Pad-refreshing consumable for removal of polyurethane pad surface clogging
Semiconductor Chip-Maker (LSI, Memory(DRAM/FLASH), Foundries)
4.25″ (Stainless Steel, Diamond-Nickel Bonding)
Semiconductor CMP process (ILD, STI, Metal)
6804.21-0000
Stable pad roughness, long conditioner life time