CVD CONDITIONER

Pad-refreshing consumable that uses CVD method to prevent diamond from shedding and minimize performance difference among products

Target

Semiconductor Chip-Maker (Non-memory, Memory (DRAM/FLASH), Foundries)

CVD Conditioner

4.25” (Stainless Steel, CVD Diamond Coating)

Semiconductor CMP process(ILD, STI, Metal, TSV, Buffing, Barrier, Poly, Gate)

6804.21-0000

Stable Pad Roughness, Long pad life time, Small debris size & Amount