DS&HIVE

Pad-refreshing consumable for removal of polyurethane pad surface clogging

Target

Semiconductor Chip-Maker (Non-memory, Memory (DRAM/FLASH), Foundries)

Product Name

DS&HIVE

Standard

4.25″ (Stainless Steel, Diamond-Nickel Bonding)

Application

Semiconductor CMP process (ILD, STI, Metal, Buffing, Barrier, Poly, Gate)

No.

6804.21-0000

Features

Stable Pad Roughness, Long conditioner life time, Long pad life time, Small debris size & Amount

How can we help?

    How can we help?