Pad-refreshing consumable for removal of polyurethane pad surface clogging
Semiconductor Chip-Maker (Non-memory, Memory (DRAM/FLASH), Foundries)
DS&HIVE
4.25″ (Stainless Steel, Diamond-Nickel Bonding)
Semiconductor CMP process (ILD, STI, Metal, Buffing, Barrier, Poly, Gate)
6804.21-0000
Stable Pad Roughness, Long conditioner life time, Long pad life time, Small debris size & Amount