STANDARD

Pad-refreshing consumable for removal of polyurethane pad surface clogging

Target

Semiconductor Chip-Maker (Non-memory, Memory(DRAM/FLASH), Foundries)

Product Name

Standard

Standard

4.25″ (Stainless Steel, Diamond-Nickel Bonding)

Application

Semiconductor CMP process(ILD, STI, Metal, TSV, Buffing, Barrier, Poly, Gate)

No.

6804.21-0000

Features

Stable Pad Roughness, Long conditioner life time

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